Filing detail
10-QCIK 0000909791
ULTRATECH STEPPER INC 10-Q
Accession 0000912057-99-005273
Filed Nov 11, 7:00 PM ETSize 112.4 KB
Filed (ET)
Nov 11, 7:00 PM ET
Accepted
—
File size
112.4 KB
SEC accession
0000912057-99-005273
Filing details
- Company
- ULTRATECH INC
- CIK
- 0000909791
- Incorporated
- DE
- Entity type
- operating
Related parties
- filerCIK 0000909791
Documents
Attached files
10-Q
10-Q
PrimaryOpen file ↗EX-27.1
EXHIBIT 27.1