Filing detail

10-KCIK 0000931059

TEGAL CORP /DE/ 10-K

Accession 0000950149-98-001041

Filed May 19, 8:00 PM ETSize 361.9 KB

Filed (ET)

May 19, 8:00 PM ET

Accepted

File size

361.9 KB

SEC accession

0000950149-98-001041

Filing details

CIK
0000931059
Incorporated
DE
Entity type
operating

Related parties

  • filerCIK 0000931059

Documents

Attached files
14 items