Filing detail
10-QCIK 0000909791
ULTRATECH STEPPER INC 10-Q
Accession 0001047469-98-020735
Filed May 14, 8:00 PM ETSize 92.4 KB
Filed (ET)
May 14, 8:00 PM ET
Accepted
—
File size
92.4 KB
SEC accession
0001047469-98-020735
Filing details
- Company
- ULTRATECH INC
- CIK
- 0000909791
- Incorporated
- DE
- Entity type
- operating
Related parties
- filerCIK 0000909791
Documents
Attached files
10-Q
10-Q
PrimaryOpen file ↗EX-27
EXHIBIT 27