Filing detail

10-QCIK 0000909791

ULTRATECH STEPPER INC 10-Q

Accession 0001047469-98-020735

Filed May 14, 8:00 PM ETSize 92.4 KB

Filed (ET)

May 14, 8:00 PM ET

Accepted

File size

92.4 KB

SEC accession

0001047469-98-020735

Filing details

CIK
0000909791
Incorporated
DE
Entity type
operating

Related parties

  • filerCIK 0000909791

Documents

Attached files
2 items