Filing detail
10-QCIK 0000909791
ULTRATECH STEPPER INC 10-Q
Accession 0001047469-98-041248
Filed Nov 15, 7:00 PM ETSize 128.9 KB
Filed (ET)
Nov 15, 7:00 PM ET
Accepted
—
File size
128.9 KB
SEC accession
0001047469-98-041248
Filing details
- Company
- ULTRATECH INC
- CIK
- 0000909791
- Incorporated
- DE
- Entity type
- operating
Related parties
- filerCIK 0000909791
Documents
Attached files
10-Q
10-Q
PrimaryOpen file ↗EX-4.6
EXHIBIT 4.6.2
EX-27
EXHIBIT 27