Filing detail
10-KCIK 0000909791
ULTRATECH STEPPER INC 10-K
Accession 0001047469-99-012641
Filed Mar 30, 7:00 PM ETSize 359.1 KB
Filed (ET)
Mar 30, 7:00 PM ET
Accepted
—
File size
359.1 KB
SEC accession
0001047469-99-012641
Filing details
- Company
- ULTRATECH INC
- CIK
- 0000909791
- Incorporated
- DE
- Entity type
- operating
Related parties
- filerCIK 0000909791
Documents
Attached files
10-K
FORM 10-K
PrimaryOpen file ↗EX-11.2
EXHIBIT 11.2
EX-21
EXHIBIT 21
EX-23
EXHIBIT 23
EX-24
EXHIBIT 24
EX-27
EXHIBIT 27