Filing detail

10-KCIK 0000909791

ULTRATECH STEPPER INC 10-K

Accession 0001047469-99-012641

Filed Mar 30, 7:00 PM ETSize 359.1 KB

Filed (ET)

Mar 30, 7:00 PM ET

Accepted

File size

359.1 KB

SEC accession

0001047469-99-012641

Filing details

CIK
0000909791
Incorporated
DE
Entity type
operating

Related parties

  • filerCIK 0000909791

Documents

Attached files
6 items