Filing detail
10-QCIK 0000909791
ULTRATECH STEPPER INC 10-Q
Accession 0001047469-99-031907
Filed Aug 12, 8:00 PM ETSize 206.0 KB
Filed (ET)
Aug 12, 8:00 PM ET
Accepted
—
File size
206.0 KB
SEC accession
0001047469-99-031907
Filing details
- Company
- ULTRATECH INC
- CIK
- 0000909791
- Incorporated
- DE
- Entity type
- operating
Related parties
- filerCIK 0000909791
Documents
Attached files
10-Q
10-Q
PrimaryOpen file ↗EX-10.15
EXHIBIT 10.15
EX-10.3-1
EXHIBIT 10.3.1
EX-27
EX-27