UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
WASHINGTON, D.C. 20549

FORM 8-K

CURRENT REPORT

Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

Date of Report (Date of earliest event reported): ~~February~~March 0504, 2026

Amtech Systems, Inc.

(Exact name of ~~Registrant~~registrant as ~~Specified~~specified in ~~Its~~its ~~Charter~~charter)

Arizona	000-11412	86-0411215
(State or Other Jurisdictionof Incorporation)	(Commission File Number)	(IRS EmployerIdentification No.)
(State or other jurisdictionof incorporation)	(Commission File Number)	(IRS EmployerIdentification No.)
58 S. River Drive, Suite 370
Tempe, Arizona		85288
(Address of Principal Executive Offices)		(Zip Code)
(Address of principal executive offices)		(Zip Code)

Registrant’s ~~Telephone~~telephone ~~Number~~number, ~~Including~~including ~~Area~~area ~~Code~~code: (480) 967-5146

     Not Applicable

    

(Former ~~Name~~name or ~~Former~~former ~~Address~~address, if ~~Changed~~changed ~~Since~~since ~~Last~~last ~~Report~~report)

Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:

☐Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)

☐Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)

☐Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))

☐Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))

Securities registered pursuant to Section 12(b) of the Act:


Title of each class	Trading Symbol(s)	Name of each exchange on which registered
Common Stock, par value $0.01 per share	ASYS	Nasdaq Global Select Market

Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (§ 230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (§ 240.12b-2 of this chapter).

Emerging growth company ☐

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. ☐

Item 25.0207 ResultsSubmission of OperationsMatters andto Financiala ConditionVote of Security Holders.

On FebruaryMarch 54, 2026, Amtech Systems, Inc. (the “Registrant” or the “Company”) announcedheld byits press2026 releaseAnnual itsMeeting resultsof Shareholders (the “Annual Meeting”). At the Annual Meeting, the Company’s shareholders considered three proposals, each of operationswhich forare described in detail in the firstCompany’s quarterdefinitive endedproxy Decemberstatement 31dated January 23, 20252026. A copyAs of January 13, 2026, there were 14,394,885 shares of the pressCompany’s releasecommon isstock includedissued, asoutstanding Exhibitand 99.1eligible to thisvote Currenton Reportthe andproposals ispresented incorporatedat hereinthe Annual Meeting. The total number of shares represented in person or by referenceproxy at the Annual Meeting was 10,468,896 or 72.73% of the shares eligible to vote. The voting results for each of the proposals are set forth below.

TheProposal information contained in this Current Report, including the accompanying Exhibit 99.1, is– furnishedElection pursuant to Item 2.02 of Form 8-K and shall not be incorporated by reference into any filing of the Registrant, whether made before or after the date hereof, regardless of any general incorporation language in such filing, unless expressly incorporated by specific reference in such filing. The information in this Current Report, including the accompanying Exhibit 99.1, shall not be deemed to be “filed” for purposes of Section 18 of the Securities Exchange Act of 1934, as amended, or otherwise subject to the liabilities of that section or Sections 11 and 12(a)(2) of the Securities Act of 1933, as amended.directors

ItemThe 9.01individuals Financiallisted Statementsbelow received the highest number of affirmative votes of the outstanding shares of the Company’s common stock present or represented by proxy and Exhibitsvoting at the Annual Meeting and were elected at the Annual Meeting to serve a one-year term on the Company’s board of directors.

d) Exhibits.


	For	Withheld	Broker Non-Votes
Robert C. Daigle	8,597,930	67,265	1,803,701
Asif Jakwani	6,543,278	2,121,917	1,803,701
Robert M. Averick	5,919,980	2,745,215	1,803,701
Michael Garnreiter	6,548,342	2,116,853	1,803,701
Michael M. Ludwig	6,124,196	2,540,999	1,803,701

Exhibit No.		Description
99.1		Press release dated February 5, 2026
104		Cover Page Interactive Data File (embedded within the Inline XBRL document)

Proposal 2 – To approve the ratification of the independent registered public accountants

SIGNATURESThe shareholders ratified the appointment of KPMG LLP as the Company’s independent registered public accounting firm for fiscal year ending September 30, 2026.

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.


For	Against	Abstain	Broker Non-Votes
10,275,061	98,916	94,919	N/A

			AMTECH SYSTEMS, INC.
Date:	February 5, 2026	By:	/s/ Mark Weaver
			Name: Mark WeaverTitle: Interim Chief Financial Officer

Proposal 3 – Advisory vote on named executive officer compensation

The shareholders approved, on an advisory basis, the compensation of the named executive officers.


For	Against	Abstain	Broker Non-Votes
5,460,635	2,740,790	463,770	1,803,701

No other proposals were submitted to a vote of the Company’s shareholders at the Annual Meeting.

SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.


			AMTECH SYSTEMS, INC.

Date:	March 6, 2026	By:	/s/ Mark Weaver
			Name: Mark Weaver Title: Interim Chief Financial Officer

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