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3//SEC Filing

THERMA WAVE INC 3

Accession 0000828119-05-000017

CIK 0000828119operating

View on SEC.gov Company Profile

Filed

Dec 14, 7:00 PM ET

Accepted

Dec 15, 7:06 PM ET

Size

4.6 KB

Accession

0000828119-05-000017

Documents

1 file

3
edgardoc.xmlPrimary
PRIMARY DOCUMENT

Issuer

THERMA WAVE INC

CIK 0000828119

Entity typeoperating

IncorporatedDE

Related Parties

1

filerCIK 0000828119

Filing Metadata

Form type: 3
Filed: Dec 14, 7:00 PM ET
Accepted: Dec 15, 7:06 PM ET
Size: 4.6 KB

View on SEC.gov