Filing detail
10-KCIK 0000877210
SUBMICRON SYSTEMS CORP 10-K
Accession 0000893220-99-000407
Filed Mar 30, 7:00 PM ETSize 435.9 KB
Filed (ET)
Mar 30, 7:00 PM ET
Accepted
—
File size
435.9 KB
SEC accession
0000893220-99-000407
Filing details
- Company
- SUBMICRON SYSTEMS CORP
- CIK
- 0000877210
- Incorporated
- DE
- Entity type
- operating
Related parties
- filerCIK 0000877210
Documents
Attached files
10-K
FORM 10-K SUBMICRON SYSTEMS CORPORATION
PrimaryOpen file ↗EX-4.5
FORM OF SERIES B 12% SENIOR SUBORDINATED, 02/01/02
EX-4.6
FORM OF WARRANT ACCOMPANYING SERIES B 12%...
EX-4.7
FORM OF SERIES 1999 12% SENIOR SUB CONV, 02/01/02
EX-10.12A
AMENDMENT TO CREDIT FACILITY WITH GREYROCK
EX-21
LIST OF SUBSIDIARIES
EX-23
CONSENT OF ERNST & YOUNG LLP
EX-27
FINANCIAL DATA SCHEDULE