SUBMICRON SYSTEMS CORP 10-K

FORM 10-K SUBMICRON SYSTEMS CORPORATION

FORM OF SERIES B 12% SENIOR SUBORDINATED, 02/01/02

FORM OF WARRANT ACCOMPANYING SERIES B 12%...

FORM OF SERIES 1999 12% SENIOR SUB CONV, 02/01/02

AMENDMENT TO CREDIT FACILITY WITH GREYROCK

LIST OF SUBSIDIARIES

CONSENT OF ERNST & YOUNG LLP

FINANCIAL DATA SCHEDULE