UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549

SECURITIES AND EXCHANGE COMMISSION

Washington, D.C. 20549

FORM 8-K

CURRENT REPORT Pursuant to section 13 or 15(d) of the Securities Exchange Act of 1934

~~Pursuant~~Date toof ~~section~~Report ~~13 or 15~~(d)Date of ~~the~~ ~~Securities~~earliest ~~Exchange~~event ~~Act~~reported) February of6, ~~1934~~2014

~~Date~~ZYGO ofCORPORATION ~~Report~~ (~~Date~~Exact Name of ~~earliest~~Registrant ~~event reported) November~~as ~~13,~~Specified ~~2013~~in its Charter)

ZYGO CORPORATION

Delaware		0-12944		06-0864500
(State or Other Jurisdiction of Incorporation)		(Commission File Number)		(IRS Employer Identification No.)

(Exact Name of Registrant as Specified in its Charter)

Laurel Brook Road, Middlefield, CT		06455-0448
(Address of Principal Executive Offices)		(Zip Code)

Delaware	0-12944	06-0864500
(State or Other Jurisdiction	(Commission	(IRS Employer
of Incorporation)	File Number)	Identification No.)
Laurel Brook Road, Middlefield, CT		06455-0448
(Address of Principal Executive Offices)		(Zip Code)

Registrant’s telephone number, including area code: (860) 347-8506

Not Applicable (Former Name or Former Address, if Changed Since Last Report)

(Former Name or Former Address, if Changed Since Last Report)

Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions (see General Instruction A.2 below):

[£ ] Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)

[£ ] Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)

[£ ] Pre-commencement communications pursuant to Rule 14d-2(b) ~~under~~ under the Exchange Act (17 CFR 240.14d-2(b))

[£ ] Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))

~~Item~~ITEM 12.0102. ~~Entry~~RESULTS ~~into~~OF aOPERATIONS ~~Material~~AND ~~Definitive~~FINANCIAL ~~Agreement~~CONDITION.

On ~~November~~February 136, ~~2013~~2014, Zygo Corporation ~~(the “Company”)~~announced ~~entered~~its ~~into an employment agreement (the “Employment Agreement”) with Gary K. Willis, effective~~financial ~~November~~results 11, 2013. Pursuant to the Employment Agreement, Mr. Willis is employed as interim Chief Executive Officer (“CEO”) of the Company. The Employment Agreement has a term that began on November 11, 2013, and will, unless sooner terminated, continue until the date a permanent CEO commences employment with the Company. Mr. Willis or the Company may terminate the Employment Agreement at any time for ~~any or no reason. Mr. Willis will be paid at~~ the ~~rate~~second ofquarter ~~$215.00 per hour, provided that the amount payable for any week will not be less than $860.00 nor more than $8,600.00, regardless~~ of ~~the~~fiscal ~~number of hours worked during that week~~2014. The ~~Employment~~ Agreement also provides for an equity award consisting of a restricted stock unit award issued under the Company’s 2012 Equity Incentive Plan (the “2012 Plan”) covering 10,000 shares of the Company’s common stock, which will vest in full ontext ~~the earliest~~ of ~~(a)~~ the ~~date~~press ~~the~~release ~~Company~~issued ~~hires a new permanent CEO and (b) November 11, 2014, and will otherwise be~~ in ~~accordance~~connection with the ~~terms~~announcement ~~of the 2012 Plan. The terms and conditions of the restricted stock unit award will be subject to~~is ~~the~~attached ~~terms~~as ofExhibit ~~the 2012 Plan and to a separate award agreement, generally consistent with those provided under the 2012 Plan~~99.1 ~~Mr. Willis will continue~~ to ~~serve~~this asCurrent aReport ~~member~~on ofForm ~~the Board of Directors of the Company, but will not receive compensation for his service as a director, so long as he is employed by the Company~~8-K.

~~Mr.~~ITEM Willis will be entitled to participate in any group health, retirement savings or other employee benefit plan of the Company, applicable generally to senior executive officers of the Company, provided, however, that Mr9.01. ~~Willis~~FINANCIAL ~~will~~STATEMENTS ~~not~~AND ~~be entitled to any paid vacation~~EXHIBITS.

~~The~~(d) foregoing description of the Employment Agreement is qualified in its entirety by reference to a copy of the Employment Agreement included as Exhibit 10.1 to this Current Report on Form 8-K, and is incorporated herein by reference.Exhibits

~~Item 5~~99.021 ~~Departure~~Press ofRelease, ~~Directors~~dated orFebruary ~~Certain~~6, ~~Officers;~~2014, ~~Election~~issued ofby ~~Directors;~~Zygo ~~Appointment~~Corporation ofthat ~~Certain~~announced ~~Officers;~~its ~~Compensatory~~financial ~~Arrangements~~results for the second quarter of ~~Certain~~fiscal ~~Officers~~2014.

5.02 (e) The description of the Company’s compensatory arrangements contained in the Employment Agreement with Mr. Willis, set forth in Item 1.01 above, is incorporated herein by reference. In addition, as noted in Item 1.01, on November 11, 2013, in accordance with the Employment Agreement, Mr. Willis received a restricted stock unit award issued under the Company’s 2012 Equity Incentive Plan (the “2012 Plan”) covering 10,000 shares of the Company’s common stock, which will vest in full on the earliest of (a) the date the Company hires a new permanent CEO and (b) November 11, 2014, and will otherwise be in accordance with the terms of the 2012 Plan and the referenced separate award agreement.2

~~Item 9.01 Financial Statements and Exhibits.~~SIGNATURES

~~(d) Exhibits~~Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.

10.1 Employment Agreement between Zygo Corporation and Gary K. Willis.

	ZYGO CORPORATION

Date: February 7, 2014	By:	/s/ John P. Jordan
		Name: John P. Jordan Title: Vice President, Chief Financial Officer & Treasurer

~~SIGNATURES~~EXHIBIT INDEX

~~Pursuant~~99.1 toPress ~~the~~Release, ~~requirements~~dated ofFebruary ~~the~~6, ~~Securities Exchange Act of 1934~~2014, ~~the~~issued ~~registrant~~by ~~has~~Zygo ~~duly~~Corporation ~~caused~~that ~~this~~announced ~~report to be signed on~~ its ~~behalf~~financial byresults for the ~~undersigned~~second ~~hereunto~~quarter ~~duly~~of ~~authorized~~fiscal 2014.

ZYGO CORPORATION

Date: November 15, 2013	By:	/s/ John P. Jordan
		Name: John P. Jordan Title: Vice President, Chief Financial Officer & Treasurer

EXHIBIT INDEX

10.1 Employment Agreement between Zygo Corporation and Gary K. Willis.

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