8-K//Current report
AXCELIS TECHNOLOGIES INC 8-K
Accession 0001104659-25-095307
$ACLSCIK 0001113232operating
Filed
Sep 30, 8:00 PM ET
Accepted
Oct 1, 7:06 AM ET
Size
1.3 MB
Accession
0001104659-25-095307
Documents
- 8-Ktm2527661d1_8k.htmPrimary
FORM 8-K
- EX-2.1tm2527661d1_ex2-1.htm
EXHIBIT 2.1
- EX-99.1tm2527661d1_ex99-1.htm
EXHIBIT 99.1
- EX-101.SCHacls-20251001.xsd
XBRL TAXONOMY EXTENSION SCHEMA
- EX-101.LABacls-20251001_lab.xml
XBRL TAXONOMY EXTENSION LABEL LINKBASE
- EX-101.PREacls-20251001_pre.xml
XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
- XMLR1.htm
IDEA: XBRL DOCUMENT
- XMLShow.js
IDEA: XBRL DOCUMENT
- XMLreport.css
IDEA: XBRL DOCUMENT
- XMLFilingSummary.xml
IDEA: XBRL DOCUMENT
- JSONMetaLinks.json
IDEA: XBRL DOCUMENT
- ZIP0001104659-25-095307-xbrl.zip
IDEA: XBRL DOCUMENT
- XMLtm2527661d1_8k_htm.xml
IDEA: XBRL DOCUMENT
Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Entity typeoperating
IncorporatedDE
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 8-K
- Filed
- Sep 30, 8:00 PM ET
- Accepted
- Oct 1, 7:06 AM ET
- Size
- 1.3 MB