AXCELIS TECHNOLOGIES INC 10-Q
Accession 0001104659-25-107689
Filed
Nov 5, 7:00 PM ET
Accepted
Nov 6, 3:37 PM ET
Size
8.7 MB
Accession
0001104659-25-107689
Documents
- 10-Qacls-20250930x10q.htmPrimary
10-Q
- EX-31.1acls-20250930xex31d1.htm
EX-31.1
- EX-31.2acls-20250930xex31d2.htm
EX-31.2
- EX-32.1acls-20250930xex32d1.htm
EX-32.1
- EX-32.2acls-20250930xex32d2.htm
EX-32.2
- EX-101.SCHacls-20250930.xsd
EX-101.SCH
- EX-101.CALacls-20250930_cal.xml
EX-101.CAL
- EX-101.DEFacls-20250930_def.xml
EX-101.DEF
- EX-101.LABacls-20250930_lab.xml
EX-101.LAB
- EX-101.PREacls-20250930_pre.xml
EX-101.PRE
- XMLR1.htm
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- XMLR2.htm
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- XMLR3.htm
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- XMLR51.htm
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- XMLR63.htm
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- XMLR64.htm
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- XMLR65.htm
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- XMLShow.js
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- XMLreport.css
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- XMLFilingSummary.xml
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- JSONMetaLinks.json
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- ZIP0001104659-25-107689-xbrl.zip
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- XMLacls-20250930x10q_htm.xml
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Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 10-Q
- Filed
- Nov 5, 7:00 PM ET
- Accepted
- Nov 6, 3:37 PM ET
- Size
- 8.7 MB