10-KAccepted Feb 26, 3:48 PM ET

AXCELIS TECHNOLOGIES INC 10-K

ACLSAXCELIS TECHNOLOGIES INC

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Accepted (ET)

3:48 PM

Feb 26, 2026

Filed

Feb 26, 2026

Documents

116

Size

14.3 MB

Summary

Summary not available

This filing does not have a written summary yet. You can still open the original filing and its exhibits.

Filing details

Company: AXCELIS TECHNOLOGIES INC
Ticker: ACLS
CIK: 0001113232
Form: 10-K
Accepted: Feb 26, 3:48 PM ET
Filed: Feb 26, 2026
Size: 14.3 MB
Accession: 0001104659-26-020461

Documents · 116

acls-20251231x10k.htmPrimary
10-K
acls-20251231xex10d1.htm
EX-10.1
acls-20251231xex10d7.htm
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acls-20251231xex10d8.htm
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acls-20251231xex14d1.htm
EX-14.1
acls-20251231xex21d1.htm
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acls-20251231xex23d1.htm
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acls-20251231xex31d1.htm
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acls-20251231xex31d2.htm
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acls-20251231xex32d1.htm
EX-32.1
acls-20251231xex32d2.htm
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acls-20251231xex14d1001.jpg
GRAPHIC
acls-20251231.xsd
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acls-20251231_def.xml
EX-101.DEF
acls-20251231_lab.xml
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acls-20251231_pre.xml
EX-101.PRE
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0001104659-26-020461-xbrl.zip
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