4//SEC Filing
AXCELIS TECHNOLOGIES INC 4
Accession 0001181431-05-038163
$ACLSCIK 0001113232operating
Filed
Jul 4, 8:00 PM ET
Accepted
Jul 5, 10:37 AM ET
Size
5.2 KB
Accession
0001181431-05-038163
Documents
Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Entity typeoperating
IncorporatedDE
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 4
- Filed
- Jul 4, 8:00 PM ET
- Accepted
- Jul 5, 10:37 AM ET
- Size
- 5.2 KB