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AXCELIS TECHNOLOGIES INC 4

Accession 0001181431-05-038164

$ACLSCIK 0001113232operating

View on SEC.gov Company Profile

Filed

Jul 4, 8:00 PM ET

Accepted

Jul 5, 10:38 AM ET

Size

6.8 KB

Accession

0001181431-05-038164

Documents

1 file

4
rrd82661.xmlPrimary
FALLON FORM 4 -RSU GRANT

Issuer

AXCELIS TECHNOLOGIES INC

CIK 0001113232

Entity typeoperating

IncorporatedDE

Related Parties

1

filerCIK 0001113232

Filing Metadata

Form type: 4
Filed: Jul 4, 8:00 PM ET
Accepted: Jul 5, 10:38 AM ET
Size: 6.8 KB

View on SEC.gov