10-QAccepted May 7, 4:04 PM ET

AMTECH SYSTEMS INC 10-Q

ASYSAMTECH SYSTEMS INC

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Accepted (ET)

4:04 PM

May 7, 2026

Filed

May 7, 2026

Documents

Size

12.1 MB

Summary

Summary not available

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Filing details

Company: AMTECH SYSTEMS INC
Ticker: ASYS
CIK: 0000720500
Form: 10-Q
Accepted: May 7, 4:04 PM ET
Filed: May 7, 2026
Size: 12.1 MB
Accession: 0001193125-26-211854

Documents · 75

asys-20260331.htmPrimary
10-Q
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img126118263_0.jpg
GRAPHIC
asys-20260331.xsd
XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT
R1.htm
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report.css
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Show.js
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FilingSummary.xml
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MetaLinks.json
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0001193125-26-211854-xbrl.zip
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asys-20260331_htm.xml
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