4//SEC Filing
THERMA WAVE INC 4
Accession 0001205027-05-000005
CIK 0000828119operating
Filed
Aug 22, 8:00 PM ET
Accepted
Aug 23, 10:40 AM ET
Size
10.0 KB
Accession
0001205027-05-000005
Documents
Issuer
THERMA WAVE INC
CIK 0000828119
Entity typeoperating
IncorporatedDE
Related Parties
1- filerCIK 0000828119
Filing Metadata
- Form type
- 4
- Filed
- Aug 22, 8:00 PM ET
- Accepted
- Aug 23, 10:40 AM ET
- Size
- 10.0 KB