4 1 NASDAC 0001206178 z8gopu#s Officer THERMA-WAVE, INC. 0000828119 94-3000561 12/31/02 4 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 4 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP [ ] Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. 1. Name and Address of Reporting Person(s) WARREN, WILLIAM E 1250 RELIANCE WAY FREMONT, CA 94539 2. Issuer Name and Ticker or Trading Symbol THERMA-WAVE, INC. (TWAV) 3. I.R.S. Identification Number of Reporting Person, if an entity (Voluntary) 4. Statement for Month/Day/Year 12/31/02 5. If Amendment, Date of Original (Month/Day/Year) 6. Relationship of Reporting Person(s) to Issuer (Check all applicable) [ ] Director [ ] 10% Owner [X] Officer (give title below) [X] Other (specify below) SR. VP BUSINESS OPERATIONS 7. Individual or Joint/Group Filing (Check Applicable Line) [X] Form filed by One Reporting Person [ ] Form filed by More than One Reporting Person

SIGNATURE OF REPORTING PERSON /S/ WARREN, WILLIAM E DATE 01/13/03

THERMA WAVE INC 4