$ASYS|4May 27, 5:13 PM ET

AMTECH SYSTEMS INC 4

4 · AMTECH SYSTEMS INC · Filed May 27, 2015

Form 4

Period: 2015-05-22

Vice President-Finance & CFO

Transactions

Exercise/Conversion
Amtech Systems, Inc. Employee Stock Option
2015-05-22−5,000→ 0 total
Exercise: $6.90From: 2010-12-08Exp: 2016-12-08→ Amtech Systems, Inc. $.01 par value common stock (5,000 underlying)
Exercise/Conversion
Amtech Systems, Inc. $.01 par value common stock
2015-05-22$2.95/sh+5,002$14,756→ 45,059 total
Sale
Amtech Systems, Inc. $.01 par value common stock
2015-05-22$11.82/sh−10,000$118,191→ 40,057 total
Sale
Amtech Systems, Inc. $.01 par value common stock
2015-05-22$11.82/sh−5,002$59,119→ 40,057 total
Exercise/Conversion
Amtech Systems, Inc. $.01 par value common stock
2015-05-22$6.90/sh+5,000$34,500→ 45,057 total
Sale
Amtech Systems, Inc. $.01 par value common stock
2015-05-22$11.82/sh−5,000$59,096→ 40,057 total
Exercise/Conversion
Amtech Systems, Inc. $.01 par value common stock
2015-05-22$8.51/sh+10,000$85,100→ 50,057 total
Exercise/Conversion
Amtech Systems, Inc. Employee Stock Option
2015-05-22−5,002→ 0 total
Exercise: $2.95From: 2014-12-11Exp: 2022-12-11→ Amtech Systems, Inc. $.01 par value common stock (5,002 underlying)
Exercise/Conversion
Amtech Systems, Inc. Employee Stock Option
2015-05-22−10,000→ 0 total
Exercise: $8.51From: 2010-04-24Exp: 2016-04-24→ Amtech Systems, Inc. $.01 par value common stock (10,000 underlying)

Footnotes (3)

[F1]Exercise of stock option.
[F2]This is the number of derivative securities, with the same terms and conditions, following the reported transaction.
[F3]This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 109,573.

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