AXCELIS TECHNOLOGIES INC 10-Q
Accession 0001558370-25-006534
Filed
May 5, 8:00 PM ET
Accepted
May 6, 5:17 PM ET
Size
7.0 MB
Accession
0001558370-25-006534
Documents
- 10-Qacls-20250331x10q.htmPrimary
10-Q
- EX-31.1acls-20250331xex31d1.htm
EX-31.1
- EX-31.2acls-20250331xex31d2.htm
EX-31.2
- EX-32.1acls-20250331xex32d1.htm
EX-32.1
- EX-32.2acls-20250331xex32d2.htm
EX-32.2
- EX-101.SCHacls-20250331.xsd
EX-101.SCH
- EX-101.CALacls-20250331_cal.xml
EX-101.CAL
- EX-101.DEFacls-20250331_def.xml
EX-101.DEF
- EX-101.LABacls-20250331_lab.xml
EX-101.LAB
- EX-101.PREacls-20250331_pre.xml
EX-101.PRE
- XMLR1.htm
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- XMLR2.htm
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- XMLR3.htm
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- XMLR59.htm
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- XMLR60.htm
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- XMLR61.htm
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- EXCELFinancial_Report.xlsx
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- XMLShow.js
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- XMLreport.css
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- XMLFilingSummary.xml
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- JSONMetaLinks.json
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- ZIP0001558370-25-006534-xbrl.zip
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- XMLacls-20250331x10q_htm.xml
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Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 10-Q
- Filed
- May 5, 8:00 PM ET
- Accepted
- May 6, 5:17 PM ET
- Size
- 7.0 MB