AXCELIS TECHNOLOGIES INC 10-Q
Accession 0001558370-25-010325
Filed
Aug 4, 8:00 PM ET
Accepted
Aug 5, 5:19 PM ET
Size
8.4 MB
Accession
0001558370-25-010325
Documents
- 10-Qacls-20250630x10q.htmPrimary
10-Q
- EX-31.1acls-20250630xex31d1.htm
EX-31.1
- EX-31.2acls-20250630xex31d2.htm
EX-31.2
- EX-32.1acls-20250630xex32d1.htm
EX-32.1
- EX-32.2acls-20250630xex32d2.htm
EX-32.2
- EX-101.SCHacls-20250630.xsd
EX-101.SCH
- EX-101.CALacls-20250630_cal.xml
EX-101.CAL
- EX-101.DEFacls-20250630_def.xml
EX-101.DEF
- EX-101.LABacls-20250630_lab.xml
EX-101.LAB
- EX-101.PREacls-20250630_pre.xml
EX-101.PRE
- XMLR1.htm
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- XMLR2.htm
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- XMLR3.htm
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- XMLR40.htm
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- XMLR44.htm
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- XMLR45.htm
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- XMLR46.htm
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- XMLR48.htm
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- XMLR50.htm
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- XMLR51.htm
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- XMLR52.htm
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- XMLR53.htm
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- XMLR55.htm
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- XMLR56.htm
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- XMLR59.htm
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- XMLR60.htm
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- XMLR61.htm
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- XMLR62.htm
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- XMLShow.js
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- XMLreport.css
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- XMLFilingSummary.xml
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- JSONMetaLinks.json
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- ZIP0001558370-25-010325-xbrl.zip
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- XMLacls-20250630x10q_htm.xml
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Issuer
AXCELIS TECHNOLOGIES INC
CIK 0001113232
Related Parties
1- filerCIK 0001113232
Filing Metadata
- Form type
- 10-Q
- Filed
- Aug 4, 8:00 PM ET
- Accepted
- Aug 5, 5:19 PM ET
- Size
- 8.4 MB