YALDAEI RAMIL 4

4 · ONTO INNOVATION INC. · Filed Mar 4, 2026

Form 4

Period: 2026-03-02

Chief Operating Officer

Transactions

Award
Common Stock
[F1]
2026-03-02+7,683→ 19,051 total
Tax Payment
Common Stock
[F2]
2026-03-03$207.50/sh−615$127,613→ 18,436 total
Award
Performance Stock Unit
[F3]
2026-03-02+1,548→ 1,548 total
Exp: 2028-03-02→ Common Stock (1,548 underlying)
Award
Performance Stock Unit
[F3]
2026-03-02+1,548→ 1,548 total
Exp: 2029-03-02→ Common Stock (1,548 underlying)

Footnotes (3)

[F1]The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.
[F2]Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.
[F3]The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Signature

By: Eric French For: Ramil Yaldaei|2026-03-04

Documents

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