Chen Shirley 4
4 · ONTO INNOVATION INC. · Filed Mar 4, 2026
Insider Transaction Report
Form 4
Chen Shirley
SVP Customer Success
Transactions
- Award
Common Stock
[F1]2026-03-02+2,523→ 15,517 total - Award
Performance Stock Unit
[F2]2026-03-02+1,261→ 1,261 totalExp: 2028-03-02→ Common Stock (1,261 underlying) - Award
Performance Stock Unit
[F2]2026-03-02+1,261→ 1,261 totalExp: 2029-03-02→ Common Stock (1,261 underlying)
Footnotes (2)
- [F1]The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.
- [F2]The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.
Signature
By: Eric French For: Shirley Chen|2026-03-04